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TECHNOLOG AND SERVICE

Epitaxial equipment


 

Single wafer reactor capability


     • Outstanding uniformity in thickness and   resistivity 

     • Unmatched process capability 

     • Thin Epi capability 

     • 8' Epi capabilit


Single wafer reactor capability


     • Good uniformity of thickness and resistivity.  

     • Excellent control of slip line.

     • Production capacity of thick film epitaxial wafers

     • 8' Epi capabilit

图片展示
图片展示

Single wafer reactor capability

图片展示
图片展示

多片硅外延炉

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