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  • Product

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    • Si Epitaxy Product
    • GaN/Si Epitaxy Product
    • SiC/SiC Epitaxy Product

    Product

  • finish size

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    • 4 inches
    • 5 inches
    • 6 inches
    • 8 inches

    finish size

  • Epitaxial film thickness (0.5 ~ 150um)

  • Other requirements / or application scope

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PRODUCT AND APPLICATIONS

——   SiC/SiC Epitaxy Product  ——

 

100V~1200V SiC EPI Wafer

/ Professional services team with mass production experience

Fully control the SiC epi and substrate quality by surface mapping, FTIR and CV testing

 

      According to the process capability, it can produce:

 

    ✔  Epitaxial dopants: n-type and p-type;

    ✔  Epitaxial wafer size: 4 inch, 6 inch;

    ✔  The thickness of epitaxial film is 0.5 ~ 50um;

    ✔  Epitaxial concentration: 1e14-1e19 / cm3

 

 

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